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Fundamental Principles of Optical Lithography: The Science of Microfabrication
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About the Author
Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.
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Product details
Paperback: 534 pages
Publisher: Wiley (December 17, 2007)
Language: English
ISBN-10: 0470727306
ISBN-13: 978-0470727300
Product Dimensions:
6.7 x 1.2 x 9.6 inches
Shipping Weight: 2.3 pounds (View shipping rates and policies)
Average Customer Review:
5.0 out of 5 stars
5 customer reviews
Amazon Best Sellers Rank:
#650,910 in Books (See Top 100 in Books)
I got Chris Mack to sign my copy. Geert wouldn't let the Imec staff sign it as a goodbye present though. :(
This book changed my life. I was poor, living in a dumpster and ignorant about the principles of optical lithography - and then I found this book. Now, I have a successful career and am a much happier person. Whatever you do, wherever you go, buy this book!
This is book is well known in the lithography community. So probably no need for this review.The book is well written and has broad coverage.It builds concepts step by step. So at the end, you might want to summarize what you learned to make it stick.My background: Optical Scientist working in computational lithography
This book was a life saver as far as a reference for my research!
A bible, my life saver. Best book on lithography for both experts and starters. Thank you Chris!tip: also watch the youtube series from Chris Mack on lithography and chemical processes.
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